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Home Industrial Technologies Double-Beam Multi-Capsule Evaporator

Double-Beam Multi-Capsule Evaporator

Description

Double-Beam multi-capsule electron evaporator for simultaneous or serial of two or three materials with different properties for their uniform deposition in various film application technologies, especially in implantation stimulation. Developed by Usikov’s Institute of Radiophysics and Electronics NASU, Kharkiv, Ukraine with support from Science and Technology Center in Ukraine (project #2050).

Innovative Aspect and Main Advantages

Design specificity.

  • Mutual for two oncoming electron beams the main magnetic quadrupole deflection system with focusing properties and evaporating objects inside it. Such design enables one to place distributed vapor sources of the evaporated materials close to each other, as well as provides normal incidence of the electron beams on the evaporation surface, keeping the size of focus spots during 2D scanning (0.1÷200 Hz) with returning secondary and reflected electrons.;
  • Flexible design of the electron guns with variation of perveance (0.3÷2.1*10-6 A/V3/2);
  • Cathodes made of ultrapure single-crystal lanthanum hexaboride having a high resistance toward ion bombardment, manufactured after a unique, in-house technology;
  • Principal magnetic quadrupole deflection system.
  • Highly cost efficient design of the electron-beam cathode-heating units.

Areas of Application

The evaporator has been implemented in the ARGO-2 technological facility (NSC “KIPT”) for ion-beam-assisted deposition of coatings with nanocristall struction.

Evaporator
Fig. 1 Evaporator in the unit for producing film materials with nano-crystal structure

Construction of the evaporator
Fig. 2 Construction of the evaporator

Stage of Development

Tested, available for demonstration.

Contact Details

Usikov Institute of Radiophysics and Electronics, National Academy of Sciences of Ukraine
Contact person: Head of the Vacuum Electronics Dept., Anatoly S. Tishchenko
Address: 12, Acad. Proskury str., 61085, Kharkiv, Ukraine
Tel.: (+38 057) 720 3395
Fax: (+38 057) 315 2105
E-mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it

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