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Home Material Sciences Microwave Microscope For Nanotechnology

Microwave Microscope For Nanotechnology


Microwave microscope is the device for the express, non-destructive and precise analysis of the materials and structure parameters used in micro- and nanoelectronics. Alongside with the high measurements locality the scanning microwave microscopy technique allows to study the surface distributions of the electrophysical semiconductor parameters: dielectrical permittivity, electrical conductivity, lifetime of the non-equilibrium carriers’ etc. Unlike the others scanning microscopy techniques (tunnel, atom-force) there is no need to use the high-cost vacuum and high-voltage equipment, contactless measurements are provided.

The microwave microscope resolution can be enhanced using the new image reconstruction algorithm based on the complexity theory and inverse problems solution methods. We have developed the microwave microscope used the millimeter-wavelength coaxial measuring aperture resonator sensor. It allows to graduate the sensor theoretically and to provide the high measurements locality because of using the tip-sharpened central coaxial conductor as microprobe.

Innovative Aspect and Main Advantages


  • solid-state microwave source with a high frequency stability;
  • novel measuring resonator with coaxial aperture;
  • < 1 micrometer resolution;
  • no need high voltage;
  • computer results processing.


  • non-termal and contactless surface modification;
  • IC structures forming.


  • cheaply than the scanning tunnel microscope for the non-atomic resolution;
  • no need vacuum equipment.

We propose:

  • the space distribution analysis
  • dielectric permittivity
  • dielectric losses
  • nonequilibrium carriers lifetime
  • other parameters of dielectrics, semiconductors and nanoclusters with a high locality
  • quantitative IC and MEMS topography imaging.

Areas of Application

Application research for nanoelectronics.

Stage of Development

Experimental setup

Contact Details

Vice-rector, Ph.D., Prof. Nikolay I. Slipchenko,
Kharkiv National University of Radio Electronics
Ukraine, 14 Lenin Ave., UKR-61166 Kharkiv,
TEL: +38057-7021362, +38057-7021413,
FAX: +38057-7021013.
E-Mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it

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