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Home Material Sciences Networked Cad Toolkit for Mems and VLSI Designing

Networked Cad Toolkit for Mems and VLSI Designing


The proposed interdisciplinary Networked Computer-Aided Design System with invariant computational procedures for design verification and optimization of Micro Electromechanical Systems (MEMS) and Very Large-Scale Integrated (VLSI) circuits enable development of microsystems in the form of chips.

The developed methodology and modeling toolkit allow collective designing of various MEMS adapted for the newest submicron technologies on the system and circuit levels using available or creating new parameterized model of MEMS subsystems. The proposed toolkit takes advantages of NetALLTED (Network ALL Technology Designer) – the authorized system for schematic design of complicated technical systems (including Nonlinear Dynamic Systems) composed of either/and electronic, hydraulic, pneumatic, mechanical, electromagnetic, and other subsystems. NetALLTED is based on the original numerical algorithms for all the stages of design: starting from steady state, frequency and transient analyses till parametrical optimization of a designed device output characteristics, optimal component tolerances assignment, centering of solution, and Yield maximization. NetALLTED can be used in distributed Web environment and can be embedded in every Intranet area with client-server base configuration.

Innovative Aspect and Main Advantages

In well-known CoventorWare and ANSYS codes Krulov-Arnoldi or mode decomposition methods are used usually for generation of reduced model equations in the form of a system of ODEs. In NetALLTED from ANSYS FEM output equations a capacitance-inductance-conductance circuit model for MEMS component is constructed automatically which reflects correctly mass, damping and stiffness matrices. Node voltages in this model correspond to velocities of the displacements w (or the rotation angles φ). The procedure of Y/Δ – transformation is applied to exclude internal nodes and reduce a circuit to a macromodel which composes input nodes and nodes of the beam (membrane) centre.

NetALLTED is based on original algorithms different from SPICE algorithms for almost all analyses, and first of all, in DC- and TR-analyses. Moreover, algorithms of NetALLTED are tailored to solve ill-conditional and stiff tasks. NetALLTED offers:

  • The new solution curve-search method for Steady State (DC) Analysis which provides the quick descent to the solution point region.
  • The Diagonal Modification Method which helps considerably preserves convergence without reordering when matrix has the “bad” pilot element.
  • The Implicit Linear Multi-step Variable-order Integration Method for Transient Analysis(TR) which uses high order back differences and allows to estimate at each time step an error for each possible integration method order (k < 7)
  • Statistical Yield Maximization Method which provides “centering” the solution point in the region of acceptable solutions.
  • The Optimization Variable-order Methods which is equivalent to taking into consideration five terms of Tailor’s series for the Goal function which considerably improve determination of a direction to the optimal point.
  • The Optimal Tolerances Assignment Method which is based on applying Optimization procedures to the special Goal function.
  • Original way of generating a system-level model of MEMS from FEM component equations.

Areas of Application

The proposed toolkit would be a powerful instrument for the development of MEMS and VLSI. Its application improves significantly their characteristics due to advanced modelling of such devices at the development stage. The toolkit in hand was used for selection of optimal ratio W/L (width to lenth) for CMOS in DEC Alpha AXP 64-bit microprocessor resulting in twice increasing its run frequency. The toolkit was used also for General Electric Ultrasonic Transducer simulation (Fig. 1.)

Fig. 1 Fragment of ultrasonic transformer (a) and the graph of decreasing
a transducer own frequency with applied voltage rise (b).

Stage of Development

NetALLTED is already being in industrial application with the library of all well-known component models, including novel BISIM3v3 and BISIM4 models, with default parameter values. User can modify the value of any model parameters when getting them from manufacturer.

In comparison with SPICE-like programs Net ALLTED offers:

  • Faster simulation speed and improved numerical convergence;
  • Sensitivity analysis for frequency and transient analyses;
  • Comprehensive optimization procedure and optimal tolerances assignment;
  • Alternative approach to the secondary response parameters determination (delays, rise and fall times, etc.);
  • Powerful user-defined modeling capability.

The subsystem of link ANSYS - NetALLTED is under implementation.

Contact Details

Prof. Anatoly Ivanovich Petrenko, D.Sc., FIEE, CEng, Director ,
Informational Resources Research Institute at National Technical University of Ukraine "Kyiv Polytechnic Institute,
37 Peremogu Road, Kyiv-56, Ukraine,
Tel/ Fax +380 44 280-9046;
Mobile +380 67 597-2077,
E-mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it

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